随着柔性电子学、压电电子学及压电光电子学等领域的蓬勃发展,可变形半导体,尤其是弹性半导体材料中的多物理场耦合问题受到了广泛关注。以压电电子学为例,当具有非中心对称性的材料(如氧化锌) 发生特定的变形时,由压电效应产生的压电势可显著地影响半导体内部的载流子分布,特别地,压电势可以用于调控界面和结区的载流子传输特性。基于压电电子学的基本原理发展的压电电子学器件为解决微纳机电系统的传感、驱动及能源问题提供了可能性。发展力–电–磁–热–载流子分布等多个物理场耦合问题的数学模型,不但具有重要的理论意义,而且为弹性半导体器件设计提供了有效的工具。
金峰教授课题组长期从事固体力学与多物理场耦合的理论和仿真研究,承担了国家自然科学基金、国家重点基础研究发展计划等多项科研项目,取得了丰硕的成果。近年来,他们在弹性半导体领域进行了全面且深入的研究,尤其是针对压电与挠曲电半导体结构的力电耦合问题。金峰教授课题组以上述研究成果为基础,总结写成专著,系统地介绍了弹性半导体的连续介质理论、结构理论及其在电子工业中的应用。《弹性半导体的多场耦合理论与应用》一书逻辑完整,层次清晰,部分已在相关学术期刊上发表,获得了学术界的广泛认可。
郭万林
南京航空航天大学教授
中国科学院院士
2022 年11 月
《弹性半导体的多场耦合理论与应用》(金峰, 屈毅林著. 北京:科学出版社,2024.2)团队近年来一直专注于弹性半导体多物理场耦合的理论与应用研究,本书是团队近年工作成果的总结。
主要聚焦于以下三个方面:
▋基于连续介质力学及电磁学等,建立了弹性半导体的连续介质物理理论(本书第2 章)。在运动与变形的描述上,采用有限变形理论和两点张量的表示方法。基于连续介质物理基本律,给出了空间描述和物质描述下的场方程,包括质量守恒、动量守恒、动量矩守恒、高斯定律、载流子连续性方程、热力学第一定律及热力学第二定律。基于耗散不等式和Coleman-Noll 步骤,建立了热力学自洽的半导体的热–电–弹性本构方程。
▋以本书建立的三维框架为基础,基于Mindlin 学派所发展的多物理场耦合结构分析方法,建立了压电半导体和挠曲电半导体的一维及二维结构理论(本书第3、4 章)。一维结构理论可用于分析压电及挠曲电半导体杆、梁结构在拉伸、弯曲、厚度剪切、扭转、翘曲、面内剪切等变形时的载流子分布情况。二维结构理论可以用于分析压电及挠曲电半导体薄膜在弯曲、厚度伸缩、二阶剪切等复杂变形时的载流子分布情况。同时,本书还建立了考虑热效应和磁效应的梁、板结构模型,用于分析半导体梁、板结构受到热应力产生的变形、失稳,以及在磁场作用下的多物理场耦合问题(本书第5、6 章)。
▋以半导体的多物理场耦合结构理论为基础,研究了压电半导体在应变传感、温度传感以及电子电路中电流的机械调控等方面的应用(第7 章)。这方面工作的主要原理为:在施加外力或产生温度变化时,由压电效应或热释电效应引起的局部势垒可改变电流的流动,从而将机械变形、温度变化等转化为电学信号。
本书以连续介质力学、连续介质热力学以及静电学为基础,建立了热力学自洽的弹性半导体的连续介质物理理论,为弹性半导体结构的力–电–热–磁–载流子分布等多个物理场的耦合问题分析建立了数学模型。本书所发展的理论为压电电子学(挠曲电电子学) 器件设计、柔性电子器件设计以及MEMS/NEMS 传感和驱动问题提供了坚实的理论基础和仿真依据。
本文摘编自《弹性半导体的多场耦合理论与应用》(金峰, 屈毅林著. 北京:科学出版社,2024.2)一书“前言”“序”,有删减修改,标题为编者所加。
ISBN 978-7-03-077356-2
责任: 杨 丹
弹性半导体结构的机械变形-电场-热场-载流子分布等物理场的耦合分析十分复杂。本书基于连续介质力学、连续介质热力学及静电学的基本原理,建立了半导体的连续介质物理模型。以该模型为基础,采用材料力学及板壳力学的建模方法系统地研究了典型弹性半导体结构中的多场耦合问题,包括一维和二维压电半导体结构(挠曲电半导体结构)在静态加载、失稳、振动时的变形及载流子分布等。作为该理论模型的应用,研究了压电半导体材料的变形传感及机械力对电子电路中电流的调控。
本书的读者对象为工学相关专业研究生及科研人员,需要具有一定的专业基础知识,掌握连续介质力学、压电理论、高等材料力学、板壳理论等。
(本文:刘四旦)
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